Media type: Electronic Conference Proceeding Title: Damage and degradation of optics and sensors under intense EUV radiation from a table-top laser produced plasma source Contributor: Barkusky, Frank; Bayer, Armin; Flöter, Bernhard; Peth, Christian; Mann, Klaus imprint: SPIE, 2009 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.837357 ISSN: 0277-786X Origination: Footnote: