Media type: Electronic Conference Proceeding Title: Reliability of MEMS deformable mirror technology used in adaptive optics imaging systems Contributor: Hartzell, Allyson L.; Cornelissen, Steven A.; Bierden, Paul A.; Lam, Charlie V.; Davis, Daniel F. Published: SPIE, 2010 Published in: SPIE Proceedings (2010) Extent: Language: Not determined DOI: 10.1117/12.845610 ISSN: 0277-786X Origination: Footnote: