Media type: Electronic Conference Proceeding Title: Template masters for substrate conformal imprint lithography generated by charged particle nanopatterning techniques Contributor: van Delft, Falco; van de Laar, Robert; Verschuuren, Marc; Platzgummer, Elmar; Loeschner, Hans Published: SPIE, 2010 Published in: SPIE Proceedings (2010) Extent: Language: Not determined DOI: 10.1117/12.863198 ISSN: 0277-786X Origination: Footnote: