Media type: Electronic Conference Proceeding Title: Simultaneous OPC and decomposition for double exposure lithography Contributor: Banerjee, Shayak; Agarwal, Kanak B.; Orshansky, Michael imprint: SPIE, 2011 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.879540 ISSN: 0277-786X Origination: Footnote: