Media type: Electronic Conference Proceeding Title: AlN-based piezoelectric bimorph microgenerator utilizing low-level non-resonant excitation Contributor: Hampl, Stefan; Cimalla, Volker; Polster, Tobias; Hoffmann, Martin imprint: SPIE, 2011 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.886881 ISSN: 0277-786X Origination: Footnote: