Media type: Electronic Conference Proceeding Title: Design of a hybrid-integrated MEMS scanning grating spectrometer Contributor: Pügner, Tino; Knobbe, Jens; Grüger, Heinrich; Schenk, Harald imprint: SPIE, 2011 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.896872 ISSN: 0277-786X Origination: Footnote: