Media type: Electronic Conference Proceeding Title: Obic-Investigations Of Integrated Circuits Using A Laser Scanning Microscope With Different Excitation Wavelengths Contributor: Bergner, Harald; Damm, Tobias imprint: SPIE, 1989 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.961774 ISSN: 0277-786X Origination: Footnote: