Media type: E-Article Title: Chemical amplification positive deep ultraviolet resist by means of partially tetrahydropyranyl-protected polyvinylphenol Contributor: Hattori, Takashi Published: SPIE-Intl Soc Optical Eng, 1993 Published in: Optical Engineering, 32 (1993) 10, Seite 2368 Language: English DOI: 10.1117/12.145971 ISSN: 0091-3286 Keywords: General Engineering ; Atomic and Molecular Physics, and Optics Origination: Footnote: