Media type: Electronic Conference Proceeding Title: Roughness measurement on supersmooth surfaces with an optical heterodyne profiler Contributor: Schmitt, Dirk-Roger; Ringel, Gabriele A.; Kratz, Frank imprint: SPIE, 1994 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.172589 ISSN: 0277-786X Origination: Footnote: