Media type: Electronic Conference Proceeding Title: High-spectral-brightness operation of narrow-linewidth KrF laser for microlithography Contributor: Novoselov, Alexander N.; Konstantinov, Boris A.; Nikiforov, Victor G.; Trinchuk, Boris F. Published: SPIE, 1994 Published in: SPIE Proceedings (1994) Extent: Language: Not determined DOI: 10.1117/12.175484 ISSN: 0277-786X Origination: Footnote: