Media type: Electronic Conference Proceeding Title: Refractive index of thin films realized by Satisloh SP reactive sputtering system Contributor: Monaco, Gianni; Colautti, Arturo; Allegro, Cristina; Godin, Tom; Gold, Steffan; Witzany, Michael imprint: SPIE, 2013 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.2030474 ISSN: 0277-786X Origination: Footnote: