Media type: Electronic Conference Proceeding Title: Short feedback loop for OPC model based on wafer level CD Contributor: Ning, Guoxiang; Thaler, Thomas; Schulz, Kristian; Philipp, Peter; Buttgereit, Ute; Ackmann, Paul; Litt, Lloyd C.; Lim, Chin Teong imprint: SPIE, 2014 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.2066169 ISSN: 0277-786X Origination: Footnote: