Media type: Electronic Conference Proceeding Title: Design, technology, and application of integrated piezoresistive scanning thermal microscopy (SThM) microcantilever Contributor: Janus, Paweł; Grabiec, Piotr; Sierakowski, Andrzej; Gotszalk, Teodor; Rudek, Maciej; Kopiec, Daniel; Majstrzyk, Wojciech; Boetsch, Guillaume; Koehler, Bernd imprint: SPIE, 2014 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.2066240 ISSN: 0277-786X Origination: Footnote: