Media type: Electronic Conference Proceeding Title: Layout dependent effects analysis on 28nm process Contributor: Li, Helen; Zhang, Mealie; Wong, Waisum; Song, Huiyuan; Xu, Wei; Hurat, Philippe; Ding, Hua; Zhang, Yifan; Cote, Michel; Huang, Jason; Lai, Ya-ch imprint: SPIE, 2015 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.2087443 ISSN: 0277-786X Origination: Footnote: