Media type: Electronic Conference Proceeding Title: Improvement of the ArF laser for photolithography Contributor: Novoselov, Alexander N.; Konstantinov, Boris A.; Nikiforov, Victor G.; Trinchuk, Boris F. Published: SPIE, 1995 Published in: SPIE Proceedings (1995) Extent: Language: Not determined DOI: 10.1117/12.209248 ISSN: 0277-786X Origination: Footnote: