Media type: Electronic Conference Proceeding Title: Simulating massively parallel electron beam inspection for sub-20 nm defects Contributor: Bunday, Benjamin D.; Mukhtar, Maseeh; Quoi, Kathy; Thiel, Brad; Malloy, Matt Published: SPIE, 2015 Published in: SPIE Proceedings, 9424 (2015), Seite 94240J Extent: 94240J Language: Without Specification DOI: 10.1117/12.2175573 ISSN: 0277-786X Origination: Footnote: