Media type: Electronic Conference Proceeding Title: Electrostatically actuated MEMS switch with resistive contact Contributor: Uvarov, Ilya V.; Naumov, Victor V.; Selyukov, Roman V. Published: SPIE, 2014 Published in: SPIE Proceedings (2014) Extent: Language: Not determined DOI: 10.1117/12.2179558 ISSN: 0277-786X Origination: Footnote: