Media type: Electronic Conference Proceeding Title: Further advancing the throughput of a multi-beam SEM Contributor: Kemen, Thomas; Malloy, Matt; Thiel, Brad; Mikula, Shawn; Denk, Winfried; Dellemann, Gregor; Zeidler, Dirk Published: SPIE, 2015 Published in: SPIE Proceedings, 9424 (2015), Seite 94241U Extent: 94241U Language: Without Specification DOI: 10.1117/12.2188560 ISSN: 0277-786X Origination: Footnote: