Media type: Electronic Conference Proceeding Title: High-efficiency embedded transmission grating Contributor: Ratzsch, Stephan; Kley, Ernst-Bernhard; Tünnermann, Andreas; Szeghalmi, Adriana imprint: SPIE, 2015 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.2191223 ISSN: 0277-786X Origination: Footnote: