Media type: Electronic Conference Proceeding Title: Extreme ultraviolet lithography for circuit fabrication at 0.1-μm feature size Contributor: Tichenor, Daniel A.; Kubiak, Glenn D.; Stulen, Richard H. imprint: SPIE, 1995 Published in: Applications of Laser Plasma Radiation II Extent: Language: Not determined DOI: 10.1117/12.220978 ISSN: 0277-786X Origination: Footnote: