Media type: Electronic Conference Proceeding Title: High-throughput machining using high average power ultrashort pulse lasers and ultrafast polygon scanner Contributor: Schille, Joerg; Schneider, Lutz; Streek, André; Kloetzer, Sascha; Loeschner, Udo Published: SPIE, 2016 Published in: SPIE Proceedings (2016) Extent: Language: Not determined DOI: 10.1117/12.2220112 ISSN: 0277-786X Origination: Footnote: