Media type: Electronic Conference Proceeding Title: Interference and nanoimprint lithography for the patterning of large areas Contributor: Tucher, Nico; Hauser, Hubert; Höhn, Oliver; Kübler, Volker; Wellens, Christine; Müller, Claas; Bläsi, Benedikt Published: SPIE, 2017 Published in: SPIE Proceedings (2017) Extent: Language: Not determined DOI: 10.1117/12.2249605 ISSN: 0277-786X Origination: Footnote: