• Media type: Electronic Conference Proceeding
  • Title: Reducing EUV mask 3D effects by alternative metal absorbers
  • Contributor: Philipsen, Vicky; Luong, Kim Vu; Souriau, Laurent; Hendrickx, Eric; Erdmann, Andreas; Xu, Dongbo; Evanschitzky, Peter; van de Kruijs, Robbert W. E.; Edrisi, Arash; Scholze, Frank; Laubis, Christian; Irmscher, Mathias; Naasz, Sandra; Reuter, Christian
  • Published: SPIE, 2017
  • Published in: SPIE Proceedings (2017)
  • Extent:
  • Language: Not determined
  • DOI: 10.1117/12.2257929
  • ISSN: 0277-786X
  • Origination:
  • Footnote: