Media type: Electronic Conference Proceeding Title: Development of a scanner-based direct laser interference patterning optical head: new surface structuring opportunities Contributor: Kunze, Tim; Zwahr, Christoph; Krupop, Benjamin; Alamri, Sabri; Rößler, Florian; Lasagni, Andrés Fabián imprint: SPIE, 2017 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.2251745 ISSN: 0277-786X Origination: Footnote: