Media type: Electronic Conference Proceeding Title: Influence of gas composition and the mask materials on the etch profile of dry-etched structures in silicon Contributor: Schwesinger, Norbert; Hotovy, Ivan; Saendig, Torsten; Pelzus, Alexander Published: SPIE, 1996 Published in: SPIE Proceedings (1996) Extent: Language: Not determined DOI: 10.1117/12.251236 ISSN: 0277-786X Origination: Footnote: