Media type: Electronic Conference Proceeding Title: Effects of crosslinking agent on lithographic performance of negative-tone resists based on poly(p-hydroxystyrene) Contributor: Lin, Qinghuang; Katnani, Ahmad D.; Willson, C. Grant imprint: SPIE, 1997 Published in: Advances in Resist Technology and Processing XIV Extent: Language: Not determined DOI: 10.1117/12.275897 ISSN: 0277-786X Origination: Footnote: