Media type: Electronic Conference Proceeding Title: UV-laser machining offers new horizon in diffractive optical elements small-series manufacturing Contributor: Prieur, Jerome; Cau, Francoise; Wais, Johannes; Ostendorf, Andreas Published: SPIE, 1997 Published in: SPIE Proceedings (1997) Extent: Language: Not determined DOI: 10.1117/12.281255 ISSN: 0277-786X Origination: Footnote: