Media type: Electronic Conference Proceeding Title: Automated assembly of micro-optical components Contributor: Eberhardt, Ramona; Scheller, Torsten; Tittelbach, Guenther; Guyenot, Volker Published: SPIE, 1998 Published in: SPIE Proceedings, 3202 (1998), Seite 117-127 Extent: 117-127 Language: Without Specification DOI: 10.1117/12.298029 ISSN: 0277-786X Origination: Footnote: