Media type: Electronic Conference Proceeding Title: Miniaturized focusing fan-out elements: design, fabrication, and characterization Contributor: Schilling, Andreas; Nussbaum, Philippe; Ossmann, Christian; Traut, Silke; Rossi, Markus; Schift, Helmut; Herzig, Hans Peter imprint: SPIE, 1998 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.308971 ISSN: 0277-786X Origination: Footnote: