Media type: Electronic Conference Proceeding Title: Preliminary results on the use of mirrors for LIGA process Contributor: Megtert, Stephan; Pantenburg, Franz J.; Achenbach, Sven; Kupka, Roland K.; Mohr, Juergen; Roulliay, Marc imprint: SPIE, 1999 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.341158 ISSN: 0277-786X Origination: Footnote: