Trefonas III, Peter;
Blacksmith, Robert F.;
Szmanda, Charles R.;
Kavanagh, Robert J.;
Adams, Timothy G.;
Taylor, Gary N.;
Coley, Suzanne;
Pohlers, Gerd
Organic antireflective coatings for 193-nm lithography
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Media type:
Electronic Conference Proceeding
Title:
Organic antireflective coatings for 193-nm lithography
Contributor:
Trefonas III, Peter;
Blacksmith, Robert F.;
Szmanda, Charles R.;
Kavanagh, Robert J.;
Adams, Timothy G.;
Taylor, Gary N.;
Coley, Suzanne;
Pohlers, Gerd