Media type: Electronic Conference Proceeding Title: Coated optics for DUV excimer laser application Contributor: Ullmann, Jens; Mertin, Michael; Lauth, Hans; Bernitzki, Helmut; Mann, Klaus R.; Ristau, Detlev; Arens, Winfried; Thielsch, Roland; Kaiser, Norbert Published: SPIE, 2000 Published in: SPIE Proceedings (2000) Extent: Language: Not determined DOI: 10.1117/12.379348 ISSN: 0277-786X Origination: Footnote: