Media type: Electronic Conference Proceeding Title: E-beam column monitoring for improved CD SEM stability and tool matching Contributor: Hayes, Timothy S.; Henninger, Randall S. Published: SPIE, 2000 Published in: SPIE Proceedings (2000) Extent: Language: Not determined DOI: 10.1117/12.386463 ISSN: 0277-786X Origination: Footnote: