Media type: Electronic Conference Proceeding Title: Defect printing issues with high-contrast chemically amplified resists Contributor: Lu, Zhijian G.; Moreau, Wayne M.; Yin, Xiaoming; Chen, K. Rex; Thomas, Alan C.; Lawson, Peggy; Jordhamo, George M.; Wu, ChungHsi J. imprint: SPIE, 2000 Published in: Advances in Resist Technology and Processing XVII Extent: Language: Not determined DOI: 10.1117/12.388284 ISSN: 0277-786X Origination: Footnote: