Media type: Electronic Conference Proceeding Title: Limits of optical lithography Contributor: Maenhoudt, Mireille; Verhaegen, Staf; Ronse, Kurt G.; Zandbergen, Peter; Muzio, Edward G. imprint: SPIE, 2000 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.389027 ISSN: 0277-786X Origination: Footnote: