Media type: Electronic Conference Proceeding Title: Peel-off probe: a cost-effective probe for electrical atomic force microscopy Contributor: Hantschel, Thomas; Slesazeck, Stefan; Duhayon, N.; Xu, Mingwei; Vandervorst, Wilfried Published: SPIE, 2000 Published in: Materials and Device Characterization in Micromachining III (2000) Extent: Language: Not determined DOI: 10.1117/12.395612 ISSN: 0277-786X Origination: Footnote: