Media type: E-Article Title: Formation of cubic silicon carbide layers on silicon under the action of continuous and pulsed carbon ion beams Contributor: Bayazitov, R. M.; Khaibullin, I. B.; Batalov, R. I.; Nurutdinov, R. M. imprint: Pleiades Publishing Ltd, 2003 Published in: Technical Physics Language: English DOI: 10.1134/1.1583828 ISSN: 1063-7842; 1090-6525 Keywords: Physics and Astronomy (miscellaneous) Origination: Footnote: