Media type: E-Article Title: Depth profiles of metal ions implanted in dielectrics at low energies Contributor: Stepanov, A. L.; Zhikharev, V. A.; Khaibullin, I. B. imprint: Pleiades Publishing Ltd, 2001 Published in: Physics of the Solid State Language: English DOI: 10.1134/1.1366008 ISSN: 1063-7834; 1090-6460 Keywords: Condensed Matter Physics ; Electronic, Optical and Magnetic Materials Origination: Footnote: