Media type: E-Article Title: Dry Etching Characteristics of 16-nm Amorphous Carbon Layer in a Dual-Frequency Plasma Etcher Contributor: Cheong, Hee-Woon; Kim, Ji-Won; Kim, Kyungji; Lee, Hwally Published: Pleiades Publishing Ltd, 2020 Published in: Plasma Physics Reports, 46 (2020) 7, Seite 732-739 Language: English DOI: 10.1134/s1063780x2007003x ISSN: 1063-780X; 1562-6938 Keywords: Physics and Astronomy (miscellaneous) ; Condensed Matter Physics Origination: Footnote: