Published in:
Applied Optics, 61 (2022) 17, Seite 5179
Language:
English
DOI:
10.1364/ao.456819
ISSN:
1559-128X;
2155-3165
Origination:
Footnote:
Description:
<jats:p>Superfine optical components are necessary for advanced engineering applications such as x-ray optics, high-power lasers, lithography, synchrotron optics, laser-based sensors, etc. Fabrication of such superfine surfaces is one of the major challenges for optical and semiconductor industries. This research focuses on the development of a magnetic nanoparticle-based nanoabrasive for superfine optical polishing. The superparamagnetic iron oxide nanoparticle (SPION)-based nanoabrasive is synthesized via a hydrothermal route by employing cost-effective precursors. Detailed characterizations of the prepared nanoabrasive are presented. Transmission electron microscopy results confirm the irregular cubic and spherical shaped morphology of the SPION nanoabrasive along with particle size distribution varying from 10–60 nm, enabling the homogenous cutting effect of the aqueous slurry for polishing. Furthermore, the high surface area and pore size are determined by Brunauer–Emmet–Teller analysis and found to be <jats:inline-formula>
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</jats:inline-formula> and 6.13 nm, respectively, providing homogenous distribution of the nanoabrasive on the surface of a BK7 substrate for material removal. Application of the developed SPION abrasive is demonstrated for superfinish optical polishing on a BK7 optical disc. The experimental polishing results show superfine surface finishing with an average roughness value of 3.5 Å. The superparamagnetic property of the developed nanoabrasive is confirmed by alternative gradient magnetometry, and it helps in recovering the used nanoabrasive after polishing. Moreover, the polishing performance of the SPION nanoabrasives is compared with a cerium nanoabrasive, which is also synthesized in this study.</jats:p>