Media type: E-Article Title: Development of a single-frequency deep-ultraviolet coherent light source Contributor: Kumagai, Hiroshi imprint: Laser Society of Japan, 2007 Published in: The Review of Laser Engineering Language: English DOI: 10.2184/lsj.35.55 ISSN: 0387-0200; 1349-6603 Origination: Footnote: Access State: Open Access