Isostructural (Alcrnbsiti)N/Tin Multilayer Nitride Films Fabricated Using a Hybrid High-Power Impulse Magnetron Sputtering/Cathode-Arc-Deposition System
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Media type:
E-Article
Title:
Isostructural (Alcrnbsiti)N/Tin Multilayer Nitride Films Fabricated Using a Hybrid High-Power Impulse Magnetron Sputtering/Cathode-Arc-Deposition System