Media type: E-Article Title: Metrology and control of electromagnetically actuated cantilevers using optical beam deflection method Contributor: Kopiec, Daniel; Majstrzyk, Wojciech; Pruchnik, Bartosz; Gacka, Ewelina; Badura, Dominik; Sierakowski, Andrzej; Janus, Paweł; Gotszalk, Teodor imprint: Polish Academy of Sciences Chancellery, 2021 Published in: Metrology and Measurement Systems Language: Polish DOI: 10.24425/mms.2021.137698 ISSN: 2300-1941 Origination: Footnote: Access State: Open Access