Media type: E-Article Title: Study on Exhaust System in Aerostatic Jornal Bearings for High Vacuum Chamber Contributor: YOSHIMOTO, Shigeka; YOSHIDA, Yuichi; DANBARA, Shinsuke; MIKAMI, Akiyoshi; IWASAKI, Kenichi Published: Japan Society for Precision Engineering, 2002 Published in: Journal of the Japan Society for Precision Engineering, 68 (2002) 4, Seite 597-601 Language: Japanese DOI: 10.2493/jjspe.68.597 ISSN: 1882-675X; 0912-0289 Keywords: Mechanical Engineering Origination: Footnote: Access State: Open Access