Media type: E-Article Title: Development of 6-dof Parallel Linked Stage for Lithography Tool : —Proof of Function— : —Proof of Function— Contributor: TANAKA, Keiichi Published: Japan Society for Precision Engineering, 2010 Published in: Journal of the Japan Society for Precision Engineering, 76 (2010) 3, Seite 304-311 Language: English DOI: 10.2493/jjspe.76.304 ISSN: 0912-0289; 1882-675X Keywords: Mechanical Engineering Origination: Footnote: Access State: Open Access