Media type: E-Article Title: Analysis of Residual Hydrocarbons in a UHV System with an Oil Diffusion Pump as a Roughing Means Contributor: ISHIMORI, Yoshio; YOSHIMURA, Nagamitsu; OIKAWA, Hisashi Published: The Vacuum Society of Japan, 1972 Published in: SHINKU, 15 (1972) 7, Seite 249-255 Language: Not determined DOI: 10.3131/jvsj.15.249 ISSN: 1880-9413; 0559-8516 Keywords: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics Origination: Footnote: Access State: Open Access