• Media type: E-Article
  • Title: Measurement of Outgassing Rate from Stainless Steel Chamber for Ultra High Vacuum and Extreme High Vacuum
  • Contributor: SOUMA, Takeshi; MATSUDA, Hiroshi
  • Published: The Vacuum Society of Japan, 1998
  • Published in: SHINKU, 41 (1998) 3, Seite 100-103
  • Language: Not determined
  • DOI: 10.3131/jvsj.41.100
  • ISSN: 0559-8516; 1880-9413
  • Keywords: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics
  • Origination:
  • Footnote:
  • Access State: Open Access