Media type: E-Article Title: Approaches to determining curvature of wafers by their topography Contributor: Dedkova, Anna A.; Florinsky, Igor V.; Djuzhev, Nikolai A. imprint: Uspekhi Fizicheskikh Nauk (UFN) Journal, 2022 Published in: Physics-Uspekhi Language: English DOI: 10.3367/ufne.2021.10.039076 ISSN: 1063-7869; 1468-4780 Keywords: General Physics and Astronomy Origination: Footnote: