• Media type: E-Article
  • Title: Approaches to determining curvature of wafers by their topography
  • Contributor: Dedkova, Anna A.; Florinsky, Igor V.; Djuzhev, Nikolai A.
  • imprint: Uspekhi Fizicheskikh Nauk (UFN) Journal, 2022
  • Published in: Uspekhi Fizicheskih Nauk
  • Language: Russian
  • DOI: 10.3367/ufnr.2021.10.039076
  • ISSN: 0042-1294; 1996-6652
  • Keywords: General Physics and Astronomy
  • Origination:
  • Footnote:
  • Access State: Open Access