Media type: E-Article Title: Approaches to determining curvature of wafers by their topography Contributor: Dedkova, Anna A.; Florinsky, Igor V.; Djuzhev, Nikolai A. imprint: Uspekhi Fizicheskikh Nauk (UFN) Journal, 2022 Published in: Uspekhi Fizicheskih Nauk Language: Russian DOI: 10.3367/ufnr.2021.10.039076 ISSN: 0042-1294; 1996-6652 Keywords: General Physics and Astronomy Origination: Footnote: Access State: Open Access