Svintsov, Alexander A.;
Knyazev, Maxim A.;
Zaitsev, Sergey I.
Calculation of the Absorbed Electron Energy 3D Distribution by the Monte Carlo Method, Presentation of the Proximity Function by Three Parameters α, β, η and Comparison with the Experiment
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Media type:
E-Article
Title:
Calculation of the Absorbed Electron Energy 3D Distribution by the Monte Carlo Method, Presentation of the Proximity Function by Three Parameters α, β, η and Comparison with the Experiment
Contributor:
Svintsov, Alexander A.;
Knyazev, Maxim A.;
Zaitsev, Sergey I.
Description:
<jats:p>The paper presents a program for simulating electron scattering in layered materials ProxyFn. Calculations show that the absorbed energy density is three-dimensional, while the contribution of the forward-scattered electrons is better described by a power function rather than the commonly used Gaussian. It is shown that for the practical correction of the proximity effect, it is possible, nevertheless, to use the classical two-dimensional proximity function containing three parameters: α, β, η. A method for determining the parameters α, β, η from three-dimensional calculations based on MC simulation and development consideration is proposed. A good agreement of the obtained parameters and experimental data for various substrates and electron energies is shown. Thus, a method for calculating the parameters of the classical proximity function for arbitrary layered substrates based on the Monte Carlo simulation has been developed.</jats:p>